The nonlinearity of moment-angle relationship of the beams in a kind of micromachine vibratory angular rate sensor is derived by using energy method.

用能量法计算了振动轮式微机械角速率传感器中梁的转角的线性关，了在这种线性影响下的传感器幅频、相频特性。

Test results show that nonlinear vibration phenomenon does exist in micromachine vibration beams, and the calculated curves of the formulas derived accords with the measured data.

用推导出的公式得到的计算数据与试验数据吻合得较好。