The physical properities of cantilever, in particular the spring constant has important influence on the microcomponent of MEMS.
摘要悬臂梁
性能参数尤其
弹性
数对MEMS中微器件性能有着重要影响。
统The physical properities of cantilever, in particular the spring constant has important influence on the microcomponent of MEMS.
摘要悬臂梁性能参数尤其弹性数对MEMS中微器件性能有着重要影响。
MEMS will be one of the most important realm of science in 21th century,and micropower which is a branch of MEMS directly relates to development of MEMS in some applied realm.
微机电统(MEMS)将21世纪最重要研究领域之一,而微能源器件MEMS其中一个重要分支,其发展直接
MEMS在某些领域中应用。
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