The physical properities of cantilever, in particular the spring constant has important influence on the microcomponent of MEMS.
摘要悬臂梁的物理
数尤其
弹系数对MEMS中微器件的有着重要的影响。
The physical properities of cantilever, in particular the spring constant has important influence on the microcomponent of MEMS.
摘要悬臂梁的物理数尤其弹系数对MEMS中微器件的有着重要的影响。
MEMS will be one of the most important realm of science in 21th century,and micropower which is a branch of MEMS directly relates to development of MEMS in some applied realm.
微机电系统(MEMS)将21世纪最重要的研究领域之一,而微源器件MEMS其中一个重要分支,其发
关系到MEMS在某些领域中的应用。
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